发明名称 シミュレーション方法、シミュレーションプログラム、加工装置およびシミュレータ
摘要 A simulation method allowing an information processing unit to perform calculation, the calculation includes: decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing; summing up the flux components for each of the plurality of unit vector directions; and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
申请公布号 JP6065612(B2) 申请公布日期 2017.01.25
申请号 JP20130014556 申请日期 2013.01.29
申请人 ソニー株式会社 发明人 久保井 信行;木下 隆
分类号 H01L21/3065;H01L21/00 主分类号 H01L21/3065
代理机构 代理人
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