发明名称 ABRASIVE PAD AND GLASS SUBSTRATE ABRADING METHOD
摘要 Problem: To provide an abrasive pad and abrading method using same that are capable of extending the life of the abrasive pad when applied to abrading the surface of glass substrates, and that can ensure abrading capability that is appropriate for abrading the surface of glass substrates. Resolution Means: An abrasive pad used for abrading the surface of a glass substrate, that includes a base material layer, and an abrasive layer provided on one side of the base material layer, the abrasive layer including a plurality of pillar shaped abrading portions arranged separated from each other on the base material layer, the abrading portions being made from abrasive material that includes polishing abrasive particles, a filler, and a binder resin, the polishing abrasive particles including abrasive particles and a glass matrix, and the filler including a first filler that fractures or drops out when the surface is being abraded, forming approximately spherical crown shaped recesses in the top face of the abrading portions.
申请公布号 EP3120379(A1) 申请公布日期 2017.01.25
申请号 EP20150764427 申请日期 2015.03.17
申请人 3M Innovative Properties Company 发明人 NAKAMURA, Yoko
分类号 H01L21/304 主分类号 H01L21/304
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