| 摘要 |
The invention provides a cleaning apparatus. It is an edge clamping type cleaning apparatus with a move keeping and maintaining mechanism for a plate shaped working piece and an easy controller to make a cleaning liquid holder move upwardly or downwardly so that the liquid does not fly out during the cleaning process. The cleaning apparatus (1) comprises a clamping arm (27) which under the exerted force from a spring portion (28) to make the maintaining portion (271) well clamped to the outer circumference of a working piece (W) when the working piece is cleaned and the cleaning liquid holder (5) is lifted. When the cleaning is done and the cleaning liquid holder is lowered, a press to the press portion (52) to give a pressure to the pressure imposing portion (272). Therefore, the maintaining portion operates at the outer circumference of the working piece. The cleaning apparatus of the invention does not have to be equipped with a special clamping mechanism, therefore, reducing the introduction of an operation portion. |
