发明名称 ロール
摘要 Provided are a roll, a film forming apparatus, and a film forming method. The present invention provides a roll used in an apparatus which may transfer a substrate, e.g., a flexible substrate such as a plastic film and a fibrous or metallic web or film and may form a film on a surface of the substrate, a film forming apparatus including the roll, and a film forming method using the film forming apparatus.
申请公布号 JP6066153(B2) 申请公布日期 2017.01.25
申请号 JP20150545377 申请日期 2013.12.02
申请人 エルジー・ケム・リミテッド 发明人 ソン・ファン・イ;ドン・リュル・キム;ジャン・ヨン・ファン
分类号 C23C16/54;H01L21/31 主分类号 C23C16/54
代理机构 代理人
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