发明名称 ETCHING COMPOSITION
摘要 This disclosure relates to etching compositions containing 1) at least one oxidizing agent; 2) at least one chelating agent; 3) at least one metal corrosion inhibitor; 4) at least one organic solvent; 5) at least one amidine base; and 6) water.
申请公布号 EP3119924(A1) 申请公布日期 2017.01.25
申请号 EP20150765751 申请日期 2015.03.17
申请人 FUJIFILM Electronic Materials U.S.A, Inc. 发明人 DORY, Thomas;KNEER, Emil A.;TAKAHASHI, Tomonori
分类号 C23F1/10;C23F1/40;C23F1/44 主分类号 C23F1/10
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