| 摘要 |
PROBLEM TO BE SOLVED: To efficiently clean contaminants adhered on a surface of a cleaning object, and separate the contaminants to be recovered.SOLUTION: A contaminant cleaning device includes: a cleaning head 1 disposed to face a surface of a cleaning object A and in contact therewith at its peripheral portion; fluid circulating pipes 2 in which a cleaning fluid F circulates through an internal space 1c of the cleaning head 1; a storage tank 3 in which the cleaning fluid F is stored in a manner in which the cleaning fluid F can be replenished; a circulation drive source 4 for circulating the cleaning fluid F stored in the storage tank 3 to the fluid circulating pipes 2; separation element supply means 5 for supplying the cleaning fluid F with a separation element having a characteristic enabling a separation of a contaminant C from a dust material W having an ionic bond with the contaminant C; pressurizing and discharging means 6 for, in a state where the cleaning fluid F circulating in the fluid circulating pipes 2 is pressurized, discharging the cleaning fluid F to the internal space 1c of the cleaning head 1 through a fluid discharge port 1a of the cleaning head 1; and recovery means 7 disposed in an intermediate portion of the fluid circulating pipes 2 on the way from a fluid recovery port 1b of the cleaning head 1 to the storage tank 3, and recovering the dust material W and the contaminant C in a state separated from each other, both contained in the circulating cleaning fluid F. |
