发明名称 磁気検出装置
摘要 PROBLEM TO BE SOLVED: To provide a reliable hall element which is inexpensive, enables mass production, does not include any element unstable in price and supply, such as a rare metal, has high mobility, and has low temperature dependence in mobility, a carrier density, and an output voltage.SOLUTION: A hall element 1 is formed, for example, via an isolation layer 12 of SiOetc. above a silicon substrate 11, on the isolation layer 12. The hall element 1 includes a channel region 13 composed of a graphite thin film, and four electrodes 14a, 14b, 14c, 14d.
申请公布号 JP6064344(B2) 申请公布日期 2017.01.25
申请号 JP20120060339 申请日期 2012.03.16
申请人 富士通株式会社 发明人 原田 直樹
分类号 H01L43/06;H01L43/14 主分类号 H01L43/06
代理机构 代理人
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