| 摘要 |
A process modeling technique uses a single statistical model developed from historical data for a typical process and uses this model to perform quality prediction or fault detection for various different process states of a process. The modeling technique determines means (and possibly standard deviations) of process parameters for each of a set of product grades, throughputs, etc., compares on-line process parameter measurements to these means and uses these comparisons in a single process model to perform quality prediction or fault detection across the various states of the process. In this manner, a single process model can be used to perform quality prediction or fault detection while the process is operating in any of the defined process stages or states. |
