| 摘要 |
PROBLEM TO BE SOLVED: To achieve both of sure fixing of a light reflection film and a movable part in a MEMS device and suppression of generation of heat stress which may lead to variation in characteristics and breakage of the MEMS device.SOLUTION: A MEMS device includes a substrate, a movable part which is arranged above the substrate and can be inclined relatively to the substrate, a support beam supporting the movable part so that it can be inclined relative to the substrate, a light reflection film arranged above the movable part, a pole brace connecting the movable part and the light reflecting film so that they are spaced from each other in a vertical direction, and a torque generation mechanism which generates a torque to incline the movable part. In this MEMS device, the movable part has a through hole penetrating from its upper surface to its lower surface. The pole brace penetrates the through hole in the vertical direction and projects sideways from the through hole along the lower surface of the movable part to be locked to the movable part and is hollow at least in a portion penetrating the through hole. |
