| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive pad by which slurry quantity can be made uniform over the whole abrasive surface of an abrasive pad, and its manufacturing method.SOLUTION: An abrasive pad 7 is provided internally with plural grooves 11 for flowing abrasive slurry on the abrasive surface 9. The plural grooves 11 extend respectively to the peripheral of the abrasive pad 9, and their downstream end parts reach the peripheral of the abrasive pad 7. At the position where a slurry flow velocity becomes relatively high, provided are an impediment structures 17 which are formed on the surface of the grooves 11 and impede the slurry flow in the groves 11, and the impediment structures 17 have plural protrusion-like objects 21 tops 23 of which face the upstream side of the grooves 11. |
