| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a mask blank using a translucent substrate which can determine more easily a concentration of hydrogen molecules contained in a translucent substrate.SOLUTION: A method of producing a mask blank for forming a thin film on the surface of a translucent substrate includes a step of preparing a translucent substrate capable of determining a concentration of hydrogen molecules from the appearance, a step of forming a thin film by sputtering and a step of carrying out an annealing treatment. In the step of forming a thin film, the sputtering conditions or the annealing treatment conditions are set according to a concentration of hydrogen molecules determined from the appearance of the substrate. |
