| 摘要 |
The present invention provides a film deposition device for depositing a thin film such as DLC (diamond-like carbon) films, etc. with excellent gas barrier properties on the inner surface, the outer surface or both surfaces of a container such as a PET bottle. The film deposition device is provided with: a film deposition chamber (6), the interior of which is kept under vacuum and which performs film deposition on multiple containers using heating elements disposed in the chamber; at least one gate chamber (2, 4, 8, 10) that communicates with the film deposition chamber (6) and the interior of which is evacuated; and conveyor mechanisms (41 - 45) for passing handling containers (56), which hold multiple containers, through the gate chambers (2, 4, 8, 10) and into the film deposition chamber (6) and transporting same out from the film deposition chamber (6). The film deposition in the film deposition chamber (6) is performed with the multiple containers being held by the handling containers (56). |
