| 主权项 |
1. A method of manufacturing a pressure sensitive structure comprising:
generating a plurality of trenches in a substrate, wherein adjacent trenches are separated from each other by a respective side-wall, wherein generating the plurality of trenches comprises:
etching trench openings;forming a coating layer on a surface of each respective trench opening, wherein the coating layer comprises material different from a material of the substrate; andsealing the respective trench opening; and after generating the plurality of trenches, removing material to generate a cavity extending from a main surface of the substrate to at least one side-wall, wherein removing material comprises:
applying a first selective etching with a higher etching rate for the material of the substrate compared to the material of the coating layer to allow a stopping of the first selective etching on the coating layer of said at least one side-wall; andapplying a second etching, the second etching removing at least partially the coating layer of at least one of the plurality of trenches. |
