Flow controlled liner having spatially distributed gas passages

摘要

Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.

主权项

1. A liner assembly for protecting an inner surface of a substrate process chamber having a plurality of gas injects, comprising:
a ring shaped body having an outer surface sized to be received by the inner surface of the substrate process chamber and an inner surface defining a substrate processing volume, wherein the ring shaped body includes a plurality of gas passages, wherein the plurality of gas passages connect the outer surface to the substrate processing volume, and the plurality of gas passages are spaced to align with the plurality of gas injects; and an upper liner disposed above the ring shaped body, wherein the upper liner includes a plurality of flow guides aligned with the plurality of gas passages.