High definition heater system having a fluid medium

摘要

An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.

主权项

1. An apparatus comprising:
a base member comprising at least one fluid passageway; a two-phase fluid is disposed within the fluid passageway, the two-phase fluid consisting of a pressurized refrigerant provided as a condensed liquid and as a gas, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member; a tuning layer secured to the base member, the tuning layer comprising a plurality of resistive heating elements defining a plurality of zones, the resistive heating elements being independently controllable; and a component secured to the tuning layer, wherein the tuning layer provides less heat transfer to the component than the base member provides to the component, when the base member provides a primary heating or a primary cooling to the component, the tuning layer selectively generates different amount of heat in the plurality of zones depending on a desired heat distribution on the component and an actual heat distribution provided by the base member to the component to fine tune the actual heat distribution provided by the base member to the component.