Plasma cleaning apparatus and method

摘要

Embodiments of the present invention generally include an apparatus for plasma cleaning and a method for plasma cleaning. The apparatus can include a lid body having a first surface for facing a pedestal during cleaning and a second surface opposite the first surface and substantially parallel to the first surface, the second surface having a first indentation sized to receive a magnet assembly, one or more handles coupled to the second surface of the lid body, and the magnet assembly resting in the first indentation. The method can include removing a sputtering target from the processing chamber, sealing the processing chamber, introducing a gas into the processing chamber, applying an RF bias to a pedestal within the processing chamber, maintaining the pedestal at a substantially constant temperature, and removing material from the pedestal to clean the pedestal.

主权项

1. A method for cleaning a processing chamber, comprising:
removing a sputtering target from the processing chamber; sealing the processing chamber; introducing a gas into the processing chamber; applying an RF bias to a pedestal within the processing chamber; maintaining the pedestal at a substantially constant temperature; and removing material from the pedestal to clean the pedestal.