Sample holder for scanning electron microscope, scanning electron microscope image observation system, and scanning electron microscope image observation method

摘要

A water solution in which an observation sample is, for example, dissolved is sandwiched on a first insulative thin film side provided under a conductive thin film. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film. The electric charges are detected by a terminal section and changes to a measurement signal. In a state in which an electron beam is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film also disappear, and the measurement signal output from the terminal section changes to 0.

主权项

1. An observation system for imaging an organic material sample in a water solution, wherein:
the organic material sample is interposed between opposing surfaces of a pair of opposing first and second insulative thin films together with the water solution; an electron beam is scan-irradiated to a conductive thin film provided on the outwardly facing surface of the first insulative thin film while the intensity of the electron beam is changed in an on-off pulsed manner; and a potential change on the outwardly facing surface of the second insulative thin film, the potential change corresponding to a difference between the dielectric constant of the organic material sample and the dielectric constant of the water solution, is detected.