Electric discharge machining apparatus, electric discharge machining method, and semiconductor substrate manufacturing method

摘要

An electric discharge machining apparatus includes: electrodes the total quantity of which is equal to N; an alternating-current power source; and capacitors the total quantity of which is equal to N. The alternating-current power source applies an alternating voltage commonly to the electrodes. One end of each of the capacitors is connected to a corresponding one of the electrodes, whereas the other ends of the capacitors are commonly connected to the alternating-current power source.

主权项

1. An electric discharge machining apparatus comprising:
a plurality of electrodes, whose total quantity is equal to N (where N is an integer), each of the electrodes is arranged adjacent to a workpiece and separated from the workpiece by an electric discharge gap; either one of an alternating-current power source and a pulse generator that applies an alternating voltage or a voltage pulse to each discharge gap; a plurality of capacitors, whose total quantity is equal to N, a first end of each capacitor being connected to a first end of the alternating-current power source or the pulse generator, and a second end of each capacitor being connected to a different one of the electrodes; and a plurality of diodes, whose total quantity is equal to N, a cathode of each diode is connected to a second end of the alternating-current power source or the pulse generator, and an anode of each diode is connected to a corresponding one of the electrodes and a corresponding one of the capacitors, wherein the workpiece comprises a semiconductor, each of the N capacitors, a corresponding one of the N electrodes, and a corresponding one of the N discharge gaps are connected in series to form N first serial circuits, the N capacitors and respectively corresponding N diodes form N second serial circuits that are parallel connected to the alternating-current power source or the pulse generator, and when charging, the alternating-current power source or the pulse generator applies the alternating voltage or the voltage pulse simultaneously to each of the N first serial circuits, and when discharging, an electric discharge to any one of the N discharge gaps occurs while electric discharges to the others of the N discharge gaps are sustained.