SENSOR DEVICE

摘要

The purpose of the present invention is to improve spatial resolution and detect localized variations in the physical properties of an examination subject. A sensor IC (1) comprises a semiconductor substrate (10) and a plurality of oscillators (20) having resonators, and the resonators of each of the plurality of oscillators (20) are made to vary the resonant frequency thereof according to the physical properties of the examination subject in the vicinity thereof, the distribution of the physical properties of the examination subject is detected on the basis of the resonant frequency and distribution of the resonators of the plurality of oscillators (20), and the distance between the centers of two of the plurality of resonators (20) that adjoin one another does not exceed 300μm.