发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device provided with a semiconductor substrate, gate trench parts formed on the surface of the semiconductor substrate, dummy trench parts formed on the surface of the semiconductor substrate, and a first surface-side electrode which is formed above the surface of the semiconductor substrate and contains a metal. The gate trench parts have a gate trench formed on the surface of the semiconductor substrate, a gate conductor part formed in the gate trench, and a gate insulation part which is formed in the gate trench above the gate conductor part and which insulates the gate conductor part and the first surface-side electrode from each other. The dummy trench parts have a dummy trench formed on the surface of the semiconductor substrate and a dummy conductor part formed in the dummy trench and coming into contact with the first surface-side electrode.
申请公布号 WO2017010393(A1) 申请公布日期 2017.01.19
申请号 WO2016JP70103 申请日期 2016.07.07
申请人 FUJI ELECTRIC CO., LTD. 发明人 NAITO Tatsuya
分类号 H01L29/739;H01L21/336;H01L27/04;H01L29/12;H01L29/78 主分类号 H01L29/739
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