SENSOR DEVICE

摘要

A sensor device has a gyro sensor and an acceleration sensor. The gyro sensor has a fixed base portion formed in a rectangular frame shape. The acceleration sensor is formed in an inside space of the fixed base portion of the rectangular frame shape. The gyro sensor is formed in an outside space formed between the fixed base portion and an outer frame portion of a sensor base plate. The gyro sensor and the acceleration sensor are formed in one chip. As a result, the sensor device can be made smaller in size.

主权项

1. A sensor device comprising;
a supporting plate; and a sensor base plate, wherein the sensor base plate comprises; an oscillation type angular velocity sensor; and an outer frame portion surrounding the oscillation type angular velocity sensor and fixed to the supporting plate, wherein the oscillation type angular velocity sensor comprises; a fixed base portion fixed to the supporting plate; a movable portion having a driving weight and a detecting weight; and a beam portion having a driving beam and a detecting beam, the driving beam connecting the driving weight to the fixed base portion and supporting the driving weight in such a way that the driving weight is movable on a plane parallel to a surface of the supporting plate, and the detecting beam connecting the detecting weight to the fixed base portion and supporting the detecting weight in such a way that the detecting weight is movable on the plane parallel to the surface of the supporting plate, and wherein the fixed base portion is formed in a frame shape so as to form an inner frame portion and a dynamic quantity sensor is formed in the sensor base plate at a position inside of the inner frame portion.