发明名称 |
TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE |
摘要 |
A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers. |
申请公布号 |
WO2017011247(A1) |
申请公布日期 |
2017.01.19 |
申请号 |
WO2016US41195 |
申请日期 |
2016.07.06 |
申请人 |
APPLIED MATERIALS ISRAEL LTD.;RATHORE, Dhananjay Singh |
发明人 |
RATHORE, Dhananjay Singh;WEINBERG, Yakov;SCHWARZBAND, Ishai;KRIS, Roman;ZAUER, Itay;GOLDMAN, Ran;NOVAK, Olga;ADAN, Ofer;LEVI, Shimon |
分类号 |
G03F7/20;G03F1/44;G03F7/11;H01L21/768 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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