| 发明名称 |
Spacer Displacement Device for a Wafer Illumination Unit and Wafer Illumination Unit |
| 摘要 |
A spacer displacement device for a wafer illumination unit comprises an actuator, a spacer which can be displaced between an active and an inactive position by the actuator, and a force transmission element which is coupled to the actuator. The force transmission element consists of wire. |
| 申请公布号 |
US2017017169(A1) |
申请公布日期 |
2017.01.19 |
| 申请号 |
US201615182945 |
申请日期 |
2016.06.15 |
| 申请人 |
SUSS MicroTec Lithography GmbH |
发明人 |
Conradi Matthias;Schulz Janusz |
| 分类号 |
G03F9/00;G03F7/20 |
主分类号 |
G03F9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A spacer displacement device for a wafer illumination unit, comprising an actuator, a spacer which can be displaced between an active and an inactive position by said actuator, and a force transmission element which is coupled to said actuator, said force transmission element consisting of wire. |
| 地址 |
Garching DE |
