发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 According to one embodiment, a semiconductor memory device includes a substrate, a stacked body provided on the substrate and including multiple electrode layers separately stacked with each other, a semiconductor film, a charge storage film provided between the semiconductor film and the multiple electrode layers, and a first insulating film provided between the semiconductor film and the charge storage film, extending in the stacking direction, and having a bottom surface contacting the substrate. The semiconductor film is provided integrally with the substrate in the stacked body, and extends in a stacking direction of the stacked body. An orientation of a crystal structure of the semiconductor film is equal to an orientation of a crystal structure of the substrate.
申请公布号 US2017018564(A1) 申请公布日期 2017.01.19
申请号 US201514935724 申请日期 2015.11.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NIHEI Ryota
分类号 H01L27/115;H01L29/04 主分类号 H01L27/115
代理机构 代理人
主权项 1. A semiconductor memory device, comprising: a substrate; a stacked body provided on the substrate and including multiple electrode layers separately stacked with each other; a semiconductor film provided integrally with the substrate in the stacked body, extending in a stacking direction of the stacked body, an orientation of a crystal structure of the semiconductor film being equal to an orientation of a crystal structure of the substrate; a charge storage film provided between the semiconductor film and the multiple electrode layers; and a first insulating film provided between the semiconductor film and the charge storage film, the first insulating film extending in the stacking direction and having a bottom surface contacting the substrate.
地址 Minato-ku JP