发明名称 REMOVABLE NOZZLE ASSEMBLY AND GAS TRANSFER SYSTEM
摘要 The present technology relates to a gas transfer system having removable nozzle assemblies, ejectors or other gas transfer device(s). The nozzle assemblies are removably connected to a monolithic liquid/gas manifold. The present technology also provides nozzle assemblies having an inner nozzle, an outer nozzle adapted for connection to the inner nozzle, and a pipe adapter for connecting the inner nozzle to a liquid manifold.
申请公布号 WO2017011650(A1) 申请公布日期 2017.01.19
申请号 WO2016US42266 申请日期 2016.07.14
申请人 KLA SYSTEMS, INC. 发明人 NEVILLE, Mark;SIINO, Frederick;WILLIAMSON, Jeffrey
分类号 B01F3/04;B05B7/24;E03B7/07;F02M19/03;F02M37/02 主分类号 B01F3/04
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