| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that although an interval of angle commands of a rotor, such as a galvano scanner tends to be reduced, deviation of rigidity or mechanical characteristics is changed by the heat generation of a movable part when the rotor is driven at a shorter interval, and also in such a case, means for achieving high speed and high accuracy is not shown.SOLUTION: A servo control system for a rotor comprises: a vibration component analysis part (207) for calculating the frequency of a vibration superimposed on a deviation; a storage part (209) for storing a correspondence table on the frequency and the magnification of the superimposed vibration; an additional input signal generating part (208) for reading a magnification corresponding to the frequency of the superimposed vibration from the storage part to generate an additional input signal suppressing the superimposed vibration and adding it to a control input; an addition input variation calculation part (212) for calculating an angle variation by the additional input signal; and an angle command magnification varying part (211) for varying the magnification of an angle command compensating excess and deficiency of the angle variation when the additional input signal is added. |
