发明名称 放射線検出器の製造方法
摘要 A method of manufacturing a radiation detector, comprising: a charge blocking layer generating step of generating a charge blocking layer on a substrate; a CdTe-layer generating step of generating a CdTe layer so as to cover the charge blocking layer on the substrate, the CdTe layer undergoing heterojunction to the charge blocking layer and being composed of a chlorine-doped polycrystalline film; and a heat treatment step of performing a heat treatment on the substrate having the CdTe layer formed thereon.
申请公布号 JP6061129(B2) 申请公布日期 2017.01.18
申请号 JP20120202723 申请日期 2012.09.14
申请人 株式会社島津製作所 发明人 徳田 敏;吉牟田 利典;岸原 弘之;貝野 正知;吉松 聖菜;土岐 貴弘;佐藤 敏幸
分类号 G01T1/24;H01L27/144;H01L27/146;H01L31/08 主分类号 G01T1/24
代理机构 代理人
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