| 摘要 |
PROBLEM TO BE SOLVED: To provide a naturatron sputtering system that complies with various needs and is high in flexibility.SOLUTION: A naturatron sputtering system 2 is provided with a sputtering section, where paired targets 9 are arranged opposite to each other with a spacing, and magnets for forming a magnetic field space between the targets 9 are arranged on back sides of the targets 9, respectively, in a vacuum container 1. The magnetic field space has a magnetic field distribution which is high in magnetic flux density at the peripheral part and low in magnetic flux density at the center part. Further, the naturatron sputtering system 2 has a substrate arranged on the lateral side of the space between the targets 9, while facing the magnetic field space. The magnets includes main magnets 12 and auxiliary magnets 11, which cooperate with each other to change the magnetic flux density at the center part relatively to the magnetic flux density at the peripheral part. |
