| 发明名称 |
INDUCTION DEVICES AND METHODS OF USING THEM |
| 摘要 |
Certain embodiments described herein are directed to induction devices that can be used to sustain a plasma. In certain configurations, the induction device may comprise one or more radial fins electrically coupled to a base. The induction device may take numerous forms including, for example, coils and plate electrodes. |
| 申请公布号 |
EP3099443(A4) |
申请公布日期 |
2017.01.18 |
| 申请号 |
EP20150742837 |
申请日期 |
2015.01.23 |
| 申请人 |
PerkinElmer Health Sciences, Inc. |
发明人 |
CHEUNG, Tak, Shun;WONG, Chui Ha, Cindy |
| 分类号 |
B23K10/00;H01J49/10;H01J49/26;H05H1/30;H05H1/32;H05H1/34 |
主分类号 |
B23K10/00 |
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