MULTILAYER TRANSPARENT ELECTROCONDUCTIVE FILM AND METHOD FOR MANUFACTURING SAME, AS WELL AS THIN-FILM SOLAR CELL AND METHOD FOR MANUFACTURING SAME

摘要

To provide a multilayer transparent electroconductive film having low resistivity and high transmitting property, and a method for manufacturing the same, as well as a thin-film solar cell and a method for manufacturing the same. The multilayer transparent electroconductive film is obtained by stacking a transparent electroconductive film (II) on a transparent electroconductive film (I), and in this structure, the transparent electroconductive film (I) contains one or more added elements selected from aluminum and gallium, and the content of the added elements is in a range represented by -2.18 × [Al] + 1.74 ‰¦ [Ga] ‰¦ -1.92 × [Al] + 6.10. The transparent electroconductive film (II) contains one or more added elements selected from aluminum and gallium, and the content of the added elements is in a range represented by -[Al] + 0.30 ‰¦ [Gas] ‰¦ -2.68 × [Al] +1.74. In this case, [Al] is the aluminum content expressed as the atomic ratio (%) Al/(Zn + Al) and [Ga] is the gallium content expressed as the atomic ratio (%) Ga/(Zn + Ga).