| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for foreign substance inspection using a terahertz wave for quickly and accurately detecting a foreign substance contained in an inspection object.SOLUTION: A foreign substance inspection device 1 comprises: scanning means 10 for scanning an object 2 to be inspected in a predetermined direction; a terahertz wave irradiation unit 11 for generating a terahertz wave 15 and irradiating the object 2 to be inspected scanned by the scan means with the terahertz wave; a terahertz wave receiving unit 12 for receiving a terahertz wave transmitted through the object to be inspected and measuring an intensity of received light; and a foreign substance presence/absence determination unit 13 for determining the presence/absence of a foreign substance contained in the object to be inspected from the intensity of received light measured by the terahertz wave receiving part. The terahertz wave irradiation unit 11 forms a spot of the terahertz wave into a substantially elliptic shape 23 and irradiates the object to be inspected with the terahertz wave with a long-axis direction of the elliptic shape oriented vertical to a scanning direction. |
