圧電素子、液体噴射ヘッド、液体噴射装置、強誘電体デバイス、焦電体デバイス、及び、圧電体デバイス

摘要

A piezoelectric layer includes a buffer layer containing an oxide containing Bi and Co and disposed on an electrode, and a layer disposed on the buffer layer and containing a perovskite oxide containing Bi, Ba, Fe and Ti. A piezoelectric element includes the piezoelectric layer and the electrode. A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and the piezoelectric element. A liquid ejecting apparatus includes the liquid ejecting head.