发明名称 切削装置
摘要 The invention provides a cutting device with a structure capable of smoothly exhausting air in a processing chamber. The cutting device comprises a chuck worktable for holding a processed object and a processing member for cutting the processed object with a cutting blade installed on the tail end of a main shaft while supplying cutting liquid to the processed object held on the chuck worktable, and is characterized by comprising a processing chamber. The processing chamber surrounds the chuck worktable and the processing member and accommodates a processing area where the processing member cuts the processed object held on the chuck worktable. The processing chamber comprises an exhaust port that exhausts air in the processing chamber to an exhaust suction source, and an intake that supplies air outside the processing chamber to the processing chamber. The exhaust port is at a downward opening in the high-speed flying direction of the cutting liquid containing the cutting bits because of the high-speed rotation of the cutting blade. The end portion wall opening of the processing chamber is formed on a side, opposite to the exhaust port relative to the cutting blade of the intake.
申请公布号 JP6061720(B2) 申请公布日期 2017.01.18
申请号 JP20130028814 申请日期 2013.02.18
申请人 株式会社ディスコ 发明人 秋田 壮一郎;高橋 聡;成田 亮治;寺師 健太郎;上妻 沙紀;名嘉眞 惇;清川 聡;岡田 圭介;石内 伸雄
分类号 H01L21/301;B24B27/06;B24B55/06 主分类号 H01L21/301
代理机构 代理人
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