| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist composition satisfying shape of resist patterns.SOLUTION: This salt is expressed by formula (I). In the formula (I), Qand Qeach independently represents a fluorine atom or a perfluoroalkyl group; Land Leach independently represents a bivalent 1-17C saturated hydrocarbon group or the like; Lrepresents an oxygen atom, a methylene group or -CO-CH-; ring Wrepresents an aromatic ring; ring Wrepresents an aliphatic ring; Rrepresents a hydroxy group, alkyl group or alkoxy group; Rrepresents an alkyl group or alkoxy group; Rrepresents a hydroxy group, hydroxyalkyl group or hydroxyalkoxy group, or the like; s and t each independently denotes an integer of 0-2; u denotes an integer of 1-3; and Zrepresents an organic counter ion. |
