SYSTEM AND METHOD FOR MEASURING LENGTH OF GAP BETWEEN ROTATING TOOL AND WORKPIECE

摘要

The present invention is to generate a pulsed laser beam having a width greater than the gap between a rotating tool and a workpiece opposed thereto, and then irradiate the gap with the generated laser beam while the optical axis thereof is tilted relative to a workpiece plane. The pulsed laser beam has one lased-pulse period per one revolution or an integer number of revolutions of the rotating tool and is directed in the same angle range relative to the rotating tool within the ON durations of the lased pulse. The light which has irradiated the gap and has not been interrupted but diffracted by the gap is detected on a light-receiving sensor to measure the length of the gap.