A vacuum pump comprises pumping elements arranged in a pumping chamber. An electric motor drives the pumping element. A frequency inverter is provided for changing the rotational speed of the electric motor. The frequency inverter is arranged in a frequency inverter housing immediately connected to the pump housing. An air cooler and a liquid cooler are arranged in the frequency inverter housing to cool the frequency inverter.
申请公布号
EP2440788(B1)
申请公布日期
2017.01.18
申请号
EP20100723116
申请日期
2010.06.07
申请人
Leybold GmbH
发明人
DREIFERT, Thomas;GIEBMANNS, Wolfgang;JENKINS, Robert;MÜLLER, Roland