CARBON ELECTRODE AND APPARATUS FOR MANUFACTURING POLYCRYSTALLINE SILICON ROD

摘要

A carbon electrode used for manufacturing a polycrystalline silicon rod, comprising a lower electrode secured on a metal electrode that is an external electrode for electrifying a silicon core; and an upper electrode placed on the lower electrode, and including a securing portion of a core holder that holds for the silicon core on an upper surface side, wherein the upper electrode is slidable in all direction in a placement surface that is a contact surface with an upper surface of the lower electrode, and wherein the upper electrode is placed on the lower electrode so that a protrusion provided in an upper part of the lower electrode is inserted into a recess provided in a upper part of the lower electrode, an inner size of the recess is larger than an outer size of the protrusion, and a gap is provided between the recess and the protrusion.