发明名称 |
PASSIVATION OF NONLINEAR OPTICAL CRYSTALS |
摘要 |
The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas. |
申请公布号 |
EP2984205(A4) |
申请公布日期 |
2017.01.18 |
申请号 |
EP20140782555 |
申请日期 |
2014.04.10 |
申请人 |
Kla-Tencor Corporation |
发明人 |
DRIBINSKI, Vladimir;CHUANG, Yung-Ho Alex |
分类号 |
C30B7/00;C30B9/00;C30B29/10;C30B29/22;C30B33/02;G01N21/84;G01N21/87;G01N21/95;G01N21/956 |
主分类号 |
C30B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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