发明名称 Reticle for non-rectangular die
摘要 The present disclosure provides a semiconductor structure. The semiconductor structure includes a non-rectangular die area, a dicing ring and a reticle area surrounding the non-rectangular die. The dicing ring is within the reticle area and surrounds the non-rectangular die area. The number of edges of the reticle area is not equal to 4.
申请公布号 US9548274(B1) 申请公布日期 2017.01.17
申请号 US201514947787 申请日期 2015.11.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 Yu Chen-Hua;Chen Ming-Fa;Yeh Sung-Feng
分类号 H01L23/544;H01L25/00;H01L21/78;H01L23/538;H01L21/268;H01L21/3065;H01L27/088;H01L27/092 主分类号 H01L23/544
代理机构 WPAT, P.C., Intellectual Property Attorneys 代理人 WPAT, P.C., Intellectual Property Attorneys ;King Anthony
主权项 1. A semiconductor structure, comprising: a non-rectangular die area; a reticle area surrounding the non-rectangular die area; and a dicing ring within the reticle area and surrounding the non-rectangular die area, wherein the number of edges of the reticle area is not equal to 4.
地址 Hsinchu TW