发明名称 |
Reticle for non-rectangular die |
摘要 |
The present disclosure provides a semiconductor structure. The semiconductor structure includes a non-rectangular die area, a dicing ring and a reticle area surrounding the non-rectangular die. The dicing ring is within the reticle area and surrounds the non-rectangular die area. The number of edges of the reticle area is not equal to 4. |
申请公布号 |
US9548274(B1) |
申请公布日期 |
2017.01.17 |
申请号 |
US201514947787 |
申请日期 |
2015.11.20 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. |
发明人 |
Yu Chen-Hua;Chen Ming-Fa;Yeh Sung-Feng |
分类号 |
H01L23/544;H01L25/00;H01L21/78;H01L23/538;H01L21/268;H01L21/3065;H01L27/088;H01L27/092 |
主分类号 |
H01L23/544 |
代理机构 |
WPAT, P.C., Intellectual Property Attorneys |
代理人 |
WPAT, P.C., Intellectual Property Attorneys ;King Anthony |
主权项 |
1. A semiconductor structure, comprising:
a non-rectangular die area; a reticle area surrounding the non-rectangular die area; and a dicing ring within the reticle area and surrounding the non-rectangular die area, wherein the number of edges of the reticle area is not equal to 4. |
地址 |
Hsinchu TW |