Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

摘要

A piezoelectric element includes a plurality of individual electrodes, a piezoelectric layer formed on each of individual electrodes, and a common electrode which is formed on the piezoelectric layer and is an electrode common to the individual electrodes. Further, a protection film covering a region, which is not covered by the common electrode on the individual electrode, is provided.

主权项

1. A piezoelectric device comprising:
a substrate having a chamber including a deformable portion; a first electrode positioned on a side of the substrate; a second electrode; a piezoelectric layer interposed between the first electrode and the second electrode; and a protection layer positioned on an opposing side of the piezoelectric layer relative to the first electrode; wherein the piezoelectric layer includes a non-active region which is not overlapped by the second electrode on the first electrode, the protection layer extends over the non-active region and the second electrode, and an entirety of the protection layer is positioned away from the deformable portion of the chamber in a longitudinal direction in a plan view.