Capacitor, MEMS device, and method of manufacturing the MEMS device

摘要

Disclosed is a capacitor. The capacitor includes a plurality of capacitor units connected to each other in parallel. The capacitor unit includes a first capacitor, a second capacitor connected to the first capacitor in parallel, and a switch selectively connected to the first capacitor or the second capacitor.

主权项

1. A variable capacitor comprising
an input terminal; an output terminal; a plurality of capacitor units interposed between the input terminal and the output terminal, and connected to each other in parallel; and a plurality of on/off switches connected to the capacitor units, respectively, and connecting the capacitor units to the output terminal, wherein each of the capacitor units comprises:
a first capacitor;a second capacitor connected to the first capacitor in parallel; anda selection switch connecting the first capacitor to the output terminal in a first state and connecting the second capacitor to the output terminal in a second state.