MEMS hinges with enhanced rotatability

摘要

A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

主权项

1. A mechanical device, comprising:
a long, narrow beam made of a rigid, elastic material, wherein the beam comprises a torsion spring; a rigid frame surrounding at least a part of the beam and configured to rotate about the torsion spring, with a gap running longitudinally along the beam between the beam and the frame; and a solid filler material, softer than the rigid, elastic material, which fills at least a part of the gap between the beam and the frame so as to permit rotational movement of the frame about a longitudinal axis of the beam while inhibiting at least one other mode of movement of the beam within the frame.