Nanopore device including graphene nanopore and method of manufacturing the same

摘要

Provided are a nanopore device with resolution improved by graphene nanopores, and a method of manufacturing the same. The nanopore device includes: a first insulating layer; a graphene layer disposed on the first insulating layer and having a nanopore formed at a center portion of the graphene layer; and first and second electrode layers disposed respectively at both sides of the nanopore on a top surface of the graphene layer, wherein a center region of the first insulating layer is removed such that the center portion of the graphene layer is exposed to the outside.

主权项

1. A nanopore device comprising:
a first insulating layer; a multilayer graphene structure disposed on the first insulating layer and having a nanopore disposed at a center portion of the multilayer graphene structure; and first and second electrode layers disposed respectively at opposite sides of the nanopore on a top surface of the multilayer graphene structure, wherein a center region of the first insulating layer has been removed such that the center portion of the multilayer graphene structure is exposed, wherein the multilayer graphene structure comprises:
a bottom graphene layer disposed on the first insulating layer;an intermediate graphene layer directly disposed on the bottom graphene layer; and a top graphene layer directly disposed on the intermediate graphene layer, a center portion of an upper surface of the top graphene layer being exposed, wherein each of the bottom, intermediate and top graphene layers is formed of graphene, wherein a width of the removed center region of the first insulating layer is larger than a diameter of the nanopore such that a center portion of a lower surface of the bottom graphene layer is exposed.