MICROBOLOMETER DETECTOR WITH CENTRALLY-LOCATED SUPPORT STRUCTURE

摘要

A microbolometer detector having an improved support structure is provided. The microbolometer detector includes a substrate and a support structure including at least one post connected to and projecting substantially vertically from the substrate. The microbolometer detector also includes a platform held above the substrate and including a central region substantially vertically aligned with the at least one post of the support structure and a peripheral region surrounding the central region, the platform being supported by the support structure from the central region thereof. The microbolometer further includes at least one thermistor located in the peripheral region of the platform. A microbolometer focal plane array including a plurality of microbolometer detectors arranged in a two-dimensional array is also provided. Embodiments of the present invention are particularly well suited for supporting relatively large platforms of microbolometer detectors, particularly for far- infrared and terahertz detection and spectroscopy applications.