Solar cell having doped semiconductor heterojunction contacts

摘要

A silicon solar cell has doped amorphous silicon contacts formed on a tunnel silicon oxide layer on a surface of a silicon substrate. High temperature processing is unnecessary in fabricating the solar cell.

主权项

1. A method of fabricating a solar cell, the method comprising:
providing a silicon substrate; forming a tunnel oxide layer on a surface of the silicon substrate; forming a first pattern of acceptor-doped semiconductor material over the tunnel oxide layer to create a plurality of emitters of a first type; forming a second pattern of donor-doped semiconductor material over the tunnel oxide layer and interleaved with the first pattern to create a plurality of emitters of a second type; and forming a first conductive pattern interconnecting the acceptor-doped semiconductor material; and forming a second conductive pattern interconnecting the donor-doped semiconductor material.