Photoresist with rare-earth sensitizers

摘要

A method of making a photoresist with rare-earth sensitizers is provided. The rare-earth sensitizer could be a salt or a rare-earth complex. According to the invention, photoresist composition is useful to pattern circuits by visible light.

主权项

1. A photoresist composition having a quantum multiphoton confinement effect and which is capable of forming an image when exposed to visible light, which comprises:
(a) about 0.1 to about 10% by weight of a rare earth (RE) complex as a sensitizer in which a rare earth ion is encapsulated by organic ligands, the RE complex sensitizer selected from the group consisting of a RE picolinate, an RE lissamine, a RE(fod)3 wherein fod is 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate, a RE(TTA)3 Phen wherein TTA is theonyltrifluoroacetone and Phen is 1,10-phenanthroline, a RE(DBM)3 Phen wherein DBM is dibenzoylmethane and Phen is 1,10-phenanthroline, and a RE fulleride; and (b) an ultraviolet, deep ultraviolet or extreme ultraviolet photoresist wherein the RE complex encapsulated by organic ligands is dissolved in the photoresist.