Semiconductor device

摘要

According to an embodiment, a semiconductor device includes a semiconductor substrate, a first region that is provided on the semiconductor substrate and has a line-and-space pattern extending in a first direction, and a second region that is provided adjacent to the first region on the semiconductor substrate and has a dummy pattern. The surface area per unit area of the second region is greater than the surface area per unit area of the first region.

主权项

1. A semiconductor device, comprising:
a semiconductor substrate including a first region and a second region adjacent to the first region, wherein a first line-and-space pattern extending along the semiconductor substrate in a first direction is disposed in the first region, a dummy pattern is disposed in the second region and has a surface area per unit area that is greater than a surface area of per unit area of the first line-and-space pattern, the dummy pattern includes a second line-and-space pattern that extends along the semiconductor substrate in the first direction, the second line-and-space pattern having a line width in a second direction along the semiconductor substrate and perpendicular to the first direction that is equal to a line width in the second direction of the first line-and-space pattern, and a first spacing distance in the second direction between lines of the first line-and-space pattern is greater than a second spacing distance in the second direction between lines of the second line-and-space pattern.