PULSED REMOTE PLASMA METHOD AND SYSTEM

摘要

A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as reactive species from the remote plasma unit are pulsed to the reaction chamber.

主权项

1. A method for providing excited species to a reaction chamber of a reactor, the method comprising the steps of:
providing a first gas to a remote plasma unit; controlling a pressure of the remote plasma unit; forming a plasma in a remote plasma unit; and pulsing first excited species to the reaction chamber, while maintaining steady-state conditions for the remote plasma unit.