| 摘要 |
An optical interferometer 1A is provided with a splitting and coupling unit 10, a first optical system 20, a second optical system 30, and a drive unit 40, and may be configured through MEMS. The splitting and coupling unit 10 has, at the boundary between the inside and outside of a transparent member, a splitting surface 11, an entry surface 12, an exit surface 13, and a coupling surface 14. The splitting and coupling unit 10 reflects a portion of incident light L0 at the splitting surface 11 so as to cause the same to be emitted as first split light L11 and causes the remaining portion to pass to the inside as second split light L21. At the coupling surface 14, the splitting and coupling unit 10 emits first split light L12 to the outside, reflects second split light L22, couples both types of light, and causes the same to be emitted to the outside as coupled light L3. As a result, the present invention achieves an MEMS optical interferometer that is capable of reducing light loss between splitting and coupling and enhancing interference efficiency. |
