| 摘要 |
This spectroscope (1) is composed of a conjugate-plane-imaging optical system and a one-shot optical system. In a conjugate-plane-imaging optical system, the image of an object (object surface) to be measured forms an optically conjugate plane with an object surface using an imaging lens or wide-angle lens, and a micro objective lens or other lens (11) that corresponds to a magnification and a visual range which are observation conditions. The conjugate plane is the object surface of a one-shot optical system, and a multiple slit (13) is disposed in the conjugate plane. The multiple slit (13) has a plurality of apertures arranged in periodic fashion in a predetermined direction. The one-shot optical system is an infinity-corrected imaging optical system brought about by an objective lens (15) and an imaging lens (17), and has a phase shifter (19) disposed in the vicinity of a Fourier transform plane, a 2D light-receiving array device (21) disposed in the imaging plane of the imaging lens (17), and a plano-concave cylindrical lens (23) disposed between the multiple slits (13) and the objective lens (15). |
